Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems by Carol F. Vezzetti

Cover of: Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems | Carol F. Vezzetti

Published by U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service] in Gaithersburg, MD, [Springfield, VA .

Written in English

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Subjects:

  • Integrated circuits -- Calibration -- Standards.,
  • Microscopes -- Calibration -- Standards.,
  • Optical measurements -- Standards.

Edition Notes

Book details

Other titlesAntireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems.
StatementCarol F. Vezzetti, Ruth N. Varner, James E. Potzick.
SeriesStandard reference materials, NIST special publication -- 260-117.
ContributionsVarner, Ruth N., Potzick, James E., National Institute of Standards and Technology (U.S.)
The Physical Object
FormatMicroform
Paginationxi, 37 p.
Number of Pages37
ID Numbers
Open LibraryOL15375343M

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